A LASER-INTERFERENCE MICROSCOPY FOR SUBMICRON SCALING

Two split laser beams were introduced from the bottom side of the stag e of an optical microscope, and combined at the sample position on the stage. The straight stripes which were produced by the interference o f the two beams were observed in the focal plane of the objective lens . The distance between two adjacent stripes was 630nm and gave the sca le for two-dimensional microscopic image, and the displacement of the stripes gave us information about the thickness and/or concentration o f the sample. This optical scale is the measure for dimensional scalin g of a microbody in sub-micron resolution.