THIN-FILM COATINGS OF (CA0.6, MG0.4)ZR4(PO4)6 ON SI3N4 AND SIC

Thin film coatings of (Ca0.6, Mg0.4)Zr4(PO4)6 (CMZP) on Si3N4, and SiC substrates, including porous SiC used in ceramic filters, were invest igated using sol-gel and dip coating techniques. The coating thickness , ranging from 1 to 5 mum, was found to vary with the selected precurs ors and their concentrations in the solution. When applied to Si3N4 an d SiC, CMZP coatings exhibit good thermal shock resistance and greatly improved alkali corrosion resistance. For porous silicon carbide, hom ogeneous, crack-free coatings were formed on both the outer surface an d the interior sections of the pore walls. The CMZP coatings on Si3N4 and SiC exhibit good thermal shock resistance. The CMZP coating greatl y improved the alkali corrosion resistance Of Si3N4 and SiC.