MO Y MULTILAYER MIRRORS FOR THE 8-12-NM WAVELENGTH REGION/

Mo/Y multilayer mirrors we- deposited by dc magnetron sputtering under different deposition conditions. They were characterized by reflectan ce measurements at normal and grazing angles of incidence, by transmis sion electron microscopy, and by Auger depth profiling. Normal-inciden ce peak reflectances of 34% and 22% were measured at wavelengths of 11 .5 and 8.1 nm, respectively. Interface roughness and contamination of the layers during deposition limit the peak reflectance of these Mo/Y mirrors.