BONDING STRUCTURE AND TRIBOLOGICAL PROPERTIES OF DLC FILMS SYNTHESIZED BY DUAL-ION BEAM SPUTTERING

Results of DLC films synthesized on Si(111), glass and AISI 52100 bear ing steel by dual ion beam sputtering at room temperature are presente d. The carbon films deposited by ion beam sputtering were simultaneous ly bombarded by CH(n+) with energies of 0.2-25 keV. Infra-red and Rama n spectroscopy revealed that films consisted of amorphous carbon with the structure of mixed sp3+sp2 bonding. It appears that carbon films b ombarded by CH(N+) with low energies of 200-400 eV have more sp3 bondi ng and high microhardness. Tribological investigation of DLC films on AISI 52100 steel under a wear load of 15 N showed a constant friction coefficient of a 1 and roughly stable wear factor of (0.436 +/- 0.06) x 10(-6) mm3 N-1 m-1 and when the load surpassed 15 N, the friction co efficients and wear factor increased with the increase of load.