Ev. Kuvaldina et al., PROBABILITY AND RATE-CONSTANT OF CHEMICAL INTERACTION OF OXYGEN-ATOMSWITH POLY(ETHYLENE-TEREPHTHALATE) FILM, High energy chemistry, 28(4), 1994, pp. 315-316
The etching of a poly(ethylene terephthalate) film in an O2 plasma aft
erglow was studied. The rates of the mass loss and the formation of ga
seous products and their dependence on temperature were determined whi
le the concentration of O(3P) atoms was simultaneously measured. It wa
s shown that the etching rate is determined only by the O(3P) concentr
ation and is proportional to it. The rate constants, the probabilities
, and the apparent activation energy for the chemical interaction of d
ie atoms with the poly(ethylene terephthalate) film were determined.