F. Hieronymi et al., LARGE-AREA LOW-CAPACITANCE INP INGAAS MSM PHOTODETECTORS FOR HIGH-SPEED OPERATION UNDER FRONT AND REAR ILLUMINATION/, Electronics Letters, 30(15), 1994, pp. 1247-1248
Large-area long-wavelength metal-semiconductor-metal (MSM) photodetect
ors fabricated on the Fe-doped InP/InGaAs material system have been ch
aracterised under front and rear illumination employing different thic
knesses of the photoactive layer. With a 350mum diameter detection are
a, theoretically limited capacitance values (0.75pF) and very low depl
etion voltages (< 1 V) were obtained. For an active layer thickness of
0.7mum, the devices show an external quantum yield of up to 60% and a
bandwidth of 0.95 GHz at 10V bias.