ATOMIC-FORCE MICROSCOPE INTEGRATED WITH A SCANNING ELECTRON-MICROSCOPE FOR TIP FABRICATION

Authors
WALTERS DA HAMPTON D DRAKE B HANSMA HG HANSMA PK
Citation
Da. Walters et al., ATOMIC-FORCE MICROSCOPE INTEGRATED WITH A SCANNING ELECTRON-MICROSCOPE FOR TIP FABRICATION, Applied physics letters, 65(6), 1994, pp. 787-789
Citations number
12
Categorie Soggetti
Physics, Applied
Journal title
Applied physics letters → ACNP
ISSN journal
00036951
Volume
65
Issue
6
Year of publication
1994
Pages
787 - 789
Database
ISI
SICI code
0003-6951(1994)65:6<787:AMIWAS>2.0.ZU;2-K
Abstract
In a new combined atomic force microscope/scanning electron microscope , we have been able to fabricate and test electron-beam-deposited tips (e-beam tips). With this instrument it was possible to test newly gro wn e-beam tips within a few minutes of their formation, without ever b reaking vacuum. Typical results on oxide-sharpened conventional tips s howed that the radius of curvature could be reduced by a factor of 2.5 with the e-beam tips.