T. Yamamoto et al., LAMINATE MAGNETIC HEADS WITH LOCALLY THICKNESS MODIFIED THIN-FILM CORES, IEEE transactions on magnetics, 30(4), 1994, pp. 1470-1476
Laminate magnetic heads with locally thickness modified cores, using e
lectron-beam evaporated FeAlSi films, have been successfully developed
. Experimental results support the numerical analyses indicating that
these thickness modified cores enable magnetic heads to be more effici
ent than corresponding heads with uniform thickness cores. Both abrasi
ve machining and anisotropic dry-etching, preferably activated by intr
oducing oxygen, can easily modify the core thickness when they are com
bined with our head fabrication process characterized by the V-shape g
rooves.