IMEC PLANS ULTRA-CLEANROOM MANUFACTURING DEVELOPMENT EFFORT

Authors
DECLERCK G
Citation
G. Declerck, IMEC PLANS ULTRA-CLEANROOM MANUFACTURING DEVELOPMENT EFFORT, Solid state technology, 37(8), 1994, pp. 42
Citations number
NO
Categorie Soggetti
Engineering, Eletrical & Electronic","Physics, Applied","Physics, Condensed Matter
Journal title
Solid state technology → ACNP
ISSN journal
0038111X
Volume
37
Issue
8
Year of publication
1994
Database
ISI
SICI code
0038-111X(1994)37:8<42:IPUMDE>2.0.ZU;2-0