SOLVING OPTICAL LITHOGRAPHY PROBLEMS BY USING SIMULATION

Authors
CRANDLE TL LEON SC
Citation
Tl. Crandle et Sc. Leon, SOLVING OPTICAL LITHOGRAPHY PROBLEMS BY USING SIMULATION, Solid state technology, 37(8), 1994, pp. 69-72
Citations number
7
Categorie Soggetti
Engineering, Eletrical & Electronic","Physics, Applied","Physics, Condensed Matter
Journal title
Solid state technology → ACNP
ISSN journal
0038111X
Volume
37
Issue
8
Year of publication
1994
Pages
69 - 72
Database
ISI
SICI code
0038-111X(1994)37:8<69:SOLPBU>2.0.ZU;2-8