MICROSTRUCTURE AND PROPERTIES OF (SR,CA)CUO2 (SR,CA)RUO3 MULTILAYERS

Epitaxial multilayer thin films of ''infinite-layer'' (Sr, Ca)CuO2 and perovskite (Sr, Ca)RuO3 have been prepared on (100) SrTiO3 substrates by multitarget rf magnetron sputtering. X-ray diffraction analyses re vealed that the multilayer structure of (Sr, Ca)CuO2/(Sr, Ca)RuO3 was successfully fabricated with a minimum layer thickness of 20 angstrom. Transmission electron microscopy measurements of the multilayers indi cated that there was no dislocation which normally exists in single-la yer films with an infinite-layer structure. Resistivities of multilaye r films at room temperature ranged from 1 to 10 mOMEGA cm and showed s emiconductor-like dependence against the temperature.