A new modified moire interferometry for measuring u, v, and w displace
ment fields is proposed. The method is actually integrated with in-pla
ne moire interferometry and a new interferometry that can attain out-o
f-plane displacements. The sensitivity of the measurement of the out-o
f-plane displacement is as high as a half-wavelength of the illuminati
ng light. The measured in-plane and out-of-plane displacement fields a
re mutually independent and definitely defined.