CHARACTERIZATION OF MICROLENSES USING A PHASE-SHIFTING SHEARING INTERFEROMETER

Authors
SICKINGER H FALKENSTORFER O LINDLEIN N SCHWIDER J
Citation
H. Sickinger et al., CHARACTERIZATION OF MICROLENSES USING A PHASE-SHIFTING SHEARING INTERFEROMETER, Optical engineering, 33(8), 1994, pp. 2680-2686
Citations number
13
Categorie Soggetti
Optics
Journal title
Optical engineering → ACNP
ISSN journal
00913286
Volume
33
Issue
8
Year of publication
1994
Pages
2680 - 2686
Database
ISI
SICI code
0091-3286(1994)33:8<2680:COMUAP>2.0.ZU;2-B
Abstract
A shearing interferometer is proposed for the characterization of micr olenses. The optical configuration of the test system enables the meas urement of the wave aberrations, the focal length, and the deviations of the lens surface from an ideal sphere. In addition, a quantitative evaluation method is given that enables the calculation of the wave ab errations (e.g., the phase function) from the shearing interferometer data.