We investigated the microscopic dissipation of contact electrified cha
rges on a thin SiO2 film in vacuum where a thin layer of water may be
adsorbed on the surface using an atomic force microscope (AFM). Charge
s with narrower spatial distributions were deposited in smaller amount
s in vacuum than in air. Moreover, the deposited charge areas in vacuu
m showed no broadening with time after contact electrification. These
demonstrate that the rapid surface diffusion of the charges in air may
be caused by a water layer adsorbed on the insulator surfaces.