A NOVEL ELECTROMAGNETIC ACCLEROMETER

A novel micro-accelerometer based on electromagnetic field induction h as been fabricated from Si [100] wafers using silicon micro machining techniques. For this design, measurements of acceleration ranging from 0-50 g have been experimentally demonstrated. The physical structure and a brief description of the fabrication process is given. The actua l size of the device is 4.2x4.2 mm, its amplified output voltage varie s linearly from 0-9 V with the rate of 0.175 V/g and the power consump tion is less than 2.5 mW. Due to the simple structure a batch processi ng with on chip signal conditioning circuitry is possible. The require d electronic circuitry compared to the capacitive accelerometers is mu ch simpler.