FABRICATION OF OPTICAL MICROENCODER

Authors
SAWADA R TANAKA H OHGUCHI O SHIMADA J SHIMOKAWA F
Citation
R. Sawada et al., FABRICATION OF OPTICAL MICROENCODER, International journal of the Japan Society for Precision Engineering, 28(1), 1994, pp. 1-4
Citations number
NO
Categorie Soggetti
Engineering, Mechanical
Journal title
International journal of the Japan Society for Precision Engineering → ACNP
ISSN journal
0916782X
Volume
28
Issue
1
Year of publication
1994
Pages
1 - 4
Database
ISI
SICI code
0916-782X(1994)28:1<1:FOOM>2.0.ZU;2-5
Abstract
This new integrated optical micro-encoder based on diffraction can mea sure the distance traveled relative to a grating scale placed one hund red and a few tens of microns away. The measurement resolution is on t he order of 0.01 mum. The encoder is extremely small (only 500 mum squ are, which is 1/100 the size of conventional encoders). It can thus be incorporated into small actuators and motors and can be moved at high speed, having extremely low inertia.