E. Furukawa et al., A TWIN-TYPE PIEZO-DRIVEN TRANSLATION MECHANISM, International journal of the Japan Society for Precision Engineering, 28(1), 1994, pp. 70-75
A monolithic translation mechanism driven by two pairs of piezoelectri
c stacks is described which was devised primarily for use in the scann
ing tunneling microscope. A monolithic flexure-hinged linkage which su
pports a moving platform 15 mm wide and 20 mm long, four piezoelectric
stacks, and a base plate are glued together to form the mechanism. A
X-Y translation stage is readily constructed by stacking one translati
on mechanism on another. Static and dynamic characteristics of the mec
hanism are considered in detail, and design formulae are presented. Ex
perimental investigation confirms that the accuracy of motion of the m
echanism can be improved by adjusting the applied voltages to the piez
oelectric stacks. It is demonstrated that the yaw of the moving platfo
rm produced by a 46 mum output displacement is reduced from 0.3 arcsec
to less than 0.1 arcsec by adjusting the applied voltage to one of th
e four piezoelectric stacks.