O. Jusko et al., DESIGN AND 3-DIMENSIONAL CALIBRATION OF A MEASURING SCANNING TUNNELING MICROSCOPE FOR METROLOGICAL APPLICATIONS, Review of scientific instruments, 65(8), 1994, pp. 2514-2518
A scanning-tunneling microscope (STM) of the scanning-sample type with
transducers for the measurement of the position in all three axes has
been developed. Motions in the X-, Y-, and Z-axis are straight and re
ctangular to a high degree and the capacitance transducers are calibra
ted in situ by plane mirror laser-interferometry. With these qualities
as part of the design, the Abbe error may be minimized. X-Y-capacitan
ce transducers and X-Y-piezo actuators are part of analog servo loops,
thus providing positioning in the X-Y-plane to a desired coordinate.
The STM is mainly built from commercially available parts.