NOVEL ANALYSIS SYSTEM OF IMAGING-PLATE PLANE-WAVE X-RAY TOPOGRAPHY FOR CHARACTERIZING LATTICE DISTORTION IN SILICON

This letter reports that a novel analysis system has been developed to determine lattice distortion in silicon single crystals from plane-wa ve X-ray topographs taken using synchrotron radiation. The system anal yzes the topographs recorded on the imaging plate and gives the distor tion as local variations in spacing and orientation of the lattice pla ne. Line analysis and mapping of the distortion in any position on the topograph can be easily performed in the system due to the overall di gitization by the imaging plate.