Design, fabrication and performance of Ka-band voltage-controlled osci
llators (VCO's) are described. High-speed self-aligned GaInP/GaAs hete
rojunction bipolar transistors (HBT's) as active devices and varactor
diodes using the base-collector junction of the HBT structure are impl
emented in the VCO's. The HBT's have an emitter area of 2 x 1.5 mum x
10 mum and incorporate a highly carbon doped base layer and a thin GaI
nP hole barrier. Oscillators with center frequencies of 35, 37, and 40
GHz exhibit tuning ranges of up to 1 GHz and typical output powers of
1-3.5 dBm. Best measured phase-noise at 1 MHz off carrier is -107 dBc
/Hz.