DETERMINATION OF ACOUSTIC PARAMETERS OF THIN-LAYERS AND FILMS FROM ELECTRICAL CHARACTERISTICS OF A COMPOUND RESONATOR

A technique for measuring absorption and velocity of bulk acoustic wav es in solids is developed and verified. The technique is based on a co mpound acoustic resonator, which includes a layer or thin film of a su bstance to be investigated. It relies on measurement and analysis of f requency dependences of the amplitude and phase of electromagnetic wav e reflection by an acoustic resonator, and it allows one to measure ab sorbance ranging from a fraction of a decibel to several hundred decib els per centimeter, accurate to 10(-2). Acoustic wave velocities can b e measured to an accuracy of 10(-4).