OPTICAL AND STRUCTURAL-PROPERTIES OF RF-SPUTTERED A-C-H FILMS

Authors
ECHCHAMIKH E AMEZIANE EL BENNOUNA A AZIZAN M BOUNOUH Y THEYE ML CERNOGORA J FAYE JL
Citation
E. Echchamikh et al., OPTICAL AND STRUCTURAL-PROPERTIES OF RF-SPUTTERED A-C-H FILMS, Solar energy materials and solar cells, 33(3), 1994, pp. 361-368
Citations number
26
Categorie Soggetti
Energy & Fuels","Material Science
Journal title
Solar energy materials and solar cells → ACNP
ISSN journal
09270248
Volume
33
Issue
3
Year of publication
1994
Pages
361 - 368
Database
ISI
SICI code
0927-0248(1994)33:3<361:OASORA>2.0.ZU;2-T
Abstract
Hydrogenated amorphous carbon (a-C:H) films prepared by reactive rf sp uttering have been studied by optical absorption, infrared and Raman s pectroscopies, and photoluminescence. The optical gap has been found t o be strongly dependent on the hydrogen pressure. This dependence has been correlated with the bound hydrogen and the sp2 carbon contents in the films.