ADSORPTION AND REACTIONS OF ETHYLSILANE ON SI(100)

The adsorption and thermal decomposition of ethylsilane was studied on the Si(100) 2 x 1 reconstructed surface using high resolution electro n energy loss spectroscopy and temperature programmed desorption mass spectrometry. Ethylsilane dissociatively absorbed on the surface at a saturation coverage of approximately 0.25 monolayers Thermal decomposi tion of ethylsilane proceeded by beta-hydride elimination, resulting i n the desorption of ethylene at 700 K. Hydrogen adsorbed on the substr ate as the 2 x 1 monohydride and desorbed at approximately 800 K, leav ing behind a carbon-free surface.