PREPARATION OF TRANSPARENT, ELECTRICALLY CONDUCTING ZNO FILM FROM ZINC ACETATE AND ALKOXIDE

Very uniform and transparent zinc oxide thin films doped with aluminiu m and indium were fabricated by the dip-coating technique using soluti ons prepared by the ethanolamine method. As starting materials, zinc a cetate and zinc n-propoxide were used. Zinc acetate and propoxide are soluble in Pr(i)OH in the presence of diethanolamine, although they ar e hardly soluble without the amine. The prepared solutions were very s table and suitable for dip-coating. Zinc oxide was crystallized by hea ting above 500-degrees-C, and doping of aluminium and indium retarded the crystallization. The electrical resistivity of the film was decrea sed by doping with aluminium and indium. The lowest resistivity of 2 x 10(-2) OMEGA cm was obtained by post-coating treatment in a nitrogen atmosphere.