J. Nakata et al., SUPPRESSION OF ALSB OXIDATION WITH HYDROCARBON PASSIVATION LAYER INDUCED BY MEV-HE+ IRRADIATION, Journal of applied physics, 76(4), 1994, pp. 2078-2085
A very thin hydrocarbon coating layer of at most a few monolayers indu
ced by the electronic scattering of MeV-He+ ion-beam irradiation effec
tively and completely suppresses oxidation of the compound semiconduct
or AlSb, which is liable to be oxidized by mere exposure to air, becau
se of the coating layer's hydrophobic property. Of the many kinds of h
ydrocarbons, alkyl and phenyl groups are particularly effective for ox
idation suppression. The AlSb oxidation mechanism and oxidation suppre
ssion mechanism are discussed.