Waveguide losses in thin film polyimides using waveguide loss spectros
copy and photothermal deflection spectroscopy as a function of cure cy
cle and structure were studied. Fluorinated sidegroups on the polyimid
e backbone lead to decreases in birefringence and absorption. The prim
ary waveguide loss mechanism is absorption, not scattering. Waveguide
losses as low as 0.4 dB/cm at 800 nm have been measured. Losses as low
as 0.3 dB/cm at 1300 nm can be inferred from the photothermal deflect
ion spectroscopy.