ION-BEAM SHAPING OF HIGH-PRECISION OPTICAL-SURFACES BY A SMALL-DIAMETER, PROGRAM-POSITIONED ION-BEAM

Authors
BOGDANOV AP DUSHKIN VA MIKHAILOVA LN KUZMIN AA
Citation
Ap. Bogdanov et al., ION-BEAM SHAPING OF HIGH-PRECISION OPTICAL-SURFACES BY A SMALL-DIAMETER, PROGRAM-POSITIONED ION-BEAM, Journal of optical technology, 61(6), 1994, pp. 474-477
Citations number
NO
Categorie Soggetti
Optics
Journal title
Journal of optical technology → ACNP
ISSN journal
10709762
Volume
61
Issue
6
Year of publication
1994
Pages
474 - 477
Database
ISI
SICI code
1070-9762(1994)61:6<474:ISOHOB>2.0.ZU;2-#
Abstract
An automated ion-beam processing system for shaping optical surfaces 5 0-500 mm in diameter has been created, with automatic maintenance of t he processing regimes, precise positioning of the beam on the surface, and high sputtering rate of the material by the ion beam. A software package has been developed for automated process planning for fabricat ing high-accuracy aspherical (including nonaxisymmetric) surfaces and for finishing (retouching) the surface shapes of optical components, w ith a shape accuracy of lambda/40-lambda/60 rms.