USING A LOW-ENERGY ION-SOURCE FOR ASSISTANCE WHEN DEPOSITING OPTICAL COATINGS

Authors
DOROSHENKO AS IVANOV AN SUPRIYANOVICH VF RYBIN VV
Citation
As. Doroshenko et al., USING A LOW-ENERGY ION-SOURCE FOR ASSISTANCE WHEN DEPOSITING OPTICAL COATINGS, Journal of optical technology, 61(6), 1994, pp. 478-479
Citations number
NO
Categorie Soggetti
Optics
Journal title
Journal of optical technology → ACNP
ISSN journal
10709762
Volume
61
Issue
6
Year of publication
1994
Pages
478 - 479
Database
ISI
SICI code
1070-9762(1994)61:6<478:UALIFA>2.0.ZU;2-C
Abstract
A nonheating method of depositing single-layer magnesium fluoride anti reflection coatings on glass substrates has been developed. This is ac complished by equipping commercial VU-1A and VU-2M vacuum systems with the Aida ion source, which provides ion treatment of the growing film in order to activate it and makes it possible to enhance the producti vity of the vacuum systems by a factor of 2.5.