As. Doroshenko et al., USING A LOW-ENERGY ION-SOURCE FOR ASSISTANCE WHEN DEPOSITING OPTICAL COATINGS, Journal of optical technology, 61(6), 1994, pp. 478-479
A nonheating method of depositing single-layer magnesium fluoride anti
reflection coatings on glass substrates has been developed. This is ac
complished by equipping commercial VU-1A and VU-2M vacuum systems with
the Aida ion source, which provides ion treatment of the growing film
in order to activate it and makes it possible to enhance the producti
vity of the vacuum systems by a factor of 2.5.