S. Nakashima et al., ZRO2 AND CU FUNCTIONALLY GRADIENT MATERIALS PREPARED BY A DYNAMIC IONMIXING PROCESS, Surface & coatings technology, 66(1-3), 1994, pp. 330-333
ZrO2-Cu films have been prepared as functionally gradient materials (F
GM) which change continuously from Cu to ZrO2. Partially stabilized Zr
O2 (PSZ) and the PSZ-Cu FGM films were prepared on a Cu substrate by a
dynamic ion mixing process. Oxygen ion irradiation was essential for
the FGM formation of the PSZ-Cu films, because films deposited without
oxygen ion irradiation were easily peeled from the substrate during t
he deposition steps. The electron beam deposition rates of Cu and ZrO2
were individually controlled. The FGM structures were analysed by X-r
ay photoelectron spectroscopy and transmission electron microscopy. Cu
and PSZ crystal grains were finely mixed in the FGM layers. The therm
al resistance of the FGMs was examined by a heat test in which the fil
m surface was heated by an Ar + H-2 plasma jet. No cracks were observe
d on the PSZ-Cu FGM surfaces after the test. However, for PSZ film (wi
thout the FGM layer) on the Cu substrate, cracks were seen.