THE BEHAVIOR OF HIGH-DOSE TI IMPLANTS IN H13 STEEL WITH A METAL VAPORVACUUM-ARC SOURCE

Authors
JI CZ ZENG YW WANG AM LOU YN
Citation
Cz. Ji et al., THE BEHAVIOR OF HIGH-DOSE TI IMPLANTS IN H13 STEEL WITH A METAL VAPORVACUUM-ARC SOURCE, Surface & coatings technology, 66(1-3), 1994, pp. 521-524
Citations number
13
Categorie Soggetti
Materials Science, Coatings & Films
Journal title
Surface & coatings technology → ACNP
ISSN journal
02578972
Volume
66
Issue
1-3
Year of publication
1994
Pages
521 - 524
Database
ISI
SICI code
0257-8972(1994)66:1-3<521:TBOHTI>2.0.ZU;2-4
Abstract
The penetration depth of Ti ions extracted at 30 kV from a metal vapou r vacuum arc source reaches 130 nm in H13 steel for a 5 x 10(17) cm-2 doping and is reduced to 60 nm for 1.5 x 10(19) cm-2. The retained con centration is 21 at.% and 49 at.% respectively. The substantial struct ural change is the formation and growth of Fe2Ti, FeTi etc., and Fe2Ti precipitate becomes dominant at very high doses. The local electronic environment around Fe sites is distinctly altered owing to the intera ctions with Ti and the bonding state of Fe atoms is greatly enhanced.