NONLOCAL ELECTRON KINETICS IN A LOW-PRESSURE INDUCTIVELY-COUPLED RADIOFREQUENCY DISCHARGE

Authors
KOLOBOV VI BEALE DF MAHONEY LJ WENDT AE
Citation
Vi. Kolobov et al., NONLOCAL ELECTRON KINETICS IN A LOW-PRESSURE INDUCTIVELY-COUPLED RADIOFREQUENCY DISCHARGE, Applied physics letters, 65(5), 1994, pp. 537-539
Citations number
9
Categorie Soggetti
Physics, Applied
Journal title
Applied physics letters → ACNP
ISSN journal
00036951
Volume
65
Issue
5
Year of publication
1994
Pages
537 - 539
Database
ISI
SICI code
0003-6951(1994)65:5<537:NEKIAL>2.0.ZU;2-#
Abstract
The Boltzmann equation for electrons is analyzed for a low-pressure in ductively coupled rf discharge in argon driven by a planar coil. Spati ally resolved probe measurements of the electron distribution function (EDF) indicate that the total energy of electrons is an argument of t he EDF. Pressure dependence of the light emission distribution is expl ained on the basis of nonlocal electron kinetics.