Y. Harada et al., FABRICATION AND MEASUREMENT OF A NB BASED SUPERCONDUCTING SINGLE-ELECTRON TRANSISTOR, Applied physics letters, 65(5), 1994, pp. 636-638
A new four-layer resist system was developed to fabricate small capaci
tance niobium tunnel junctions. Nb/AlO(x)/Al junctions were used to ma
ke a superconducting single electron transistor composed of two dc SQU
IDs in series. The current-voltage characteristics were measured and t
wo types of resonant tunneling of Cooper pairs were observed at differ
ent magnetic fields.