We consider important modeling issues accentuated by the scaling of fi
eld effect transistors (FETs) into the submicron regime. High electric
fields enhance non-ideal phenomena such a channel length modulation,
hot-electron effects, and bias dependent mobility. In addition, improp
er scaling of device dimensions and doping levels give rise to so-call
ed short-channel effects resulting from a weakening of the gate contro
l over the channel charge, causing threshold voltage shift, increased
leakage current, and ultimately punchthrough. Our modeling approach is
based on a unified charge-control model (UCCM), which allows us to co
mbine accuracy and good convergence properties with physically based m
odel parameters. The various effects associated high fields and short
channels in FETs are contained in a description of the linear conducta
nce, the saturation current, and the subthreshold current, which are c
ombined in unified and continuous expressions for the drain current an
d the intrinsic capacitances using UCCM.