CAPILLARY PLUG-FLOW DISTRIBUTOR FOR STAGNATION POINT FLOW APCVD REACTOR

Authors
GADGIL PN
Citation
Pn. Gadgil, CAPILLARY PLUG-FLOW DISTRIBUTOR FOR STAGNATION POINT FLOW APCVD REACTOR, Materials letters, 20(5-6), 1994, pp. 351-354
Citations number
11
Categorie Soggetti
Material Science","Physics, Applied
Journal title
Materials letters → ACNP
ISSN journal
0167577X
Volume
20
Issue
5-6
Year of publication
1994
Pages
351 - 354
Database
ISI
SICI code
0167-577X(1994)20:5-6<351:CPDFSP>2.0.ZU;2-#
Abstract
A novel flow distributor formed by cementing together uniform thin wal led capillaries, termed a ''capillary plug'', is employed as a gas dis tributor in a stagnation point flow APCVD reactor (AP = anisotropic po rous). Its simplicity and high permeability allow reproducible film de position over 9 cm2 area with +/- 2% thickness uniformity. Its design parameters, flow characteristics and advantages over conventional flow distributors are analyzed.