EXPERIMENT OF SOFT-X-RAY LITHOGRAPHY USING A REPETITIVELY LASER-PRODUCED PLASMA SOURCE

Authors
GUO YB
Citation
Yb. Guo, EXPERIMENT OF SOFT-X-RAY LITHOGRAPHY USING A REPETITIVELY LASER-PRODUCED PLASMA SOURCE, Chinese Science Bulletin, 41(24), 1996, pp. 2047-2049
Citations number
3
Categorie Soggetti
Multidisciplinary Sciences
Journal title
Chinese Science Bulletin → ACNP
ISSN journal
10016538
Volume
41
Issue
24
Year of publication
1996
Pages
2047 - 2049
Database
ISI
SICI code
1001-6538(1996)41:24<2047:EOSLUA>2.0.ZU;2-8