MATERIALS ISSUES IN COPPER INTERCONNECTIONS

Authors
HARPER JME COLGAN EG HU CK HUMMEL JP BUCHWALTER LP UZOH CE
Citation
Jme. Harper et al., MATERIALS ISSUES IN COPPER INTERCONNECTIONS, MRS bulletin, 19(8), 1994, pp. 23-29
Citations number
66
Categorie Soggetti
Material Science","Physics, Applied
Journal title
MRS bulletin → ACNP
ISSN journal
08837694
Volume
19
Issue
8
Year of publication
1994
Pages
23 - 29
Database
ISI
SICI code
0883-7694(1994)19:8<23:MIICI>2.0.ZU;2-D