CHEMICAL-VAPOR-DEPOSITION OF COPPER FOR ADVANCED ON-CHIP INTERCONNECTS

Authors
GELATOS AV JAIN A MARSH R MOGAB CJ
Citation
Av. Gelatos et al., CHEMICAL-VAPOR-DEPOSITION OF COPPER FOR ADVANCED ON-CHIP INTERCONNECTS, MRS bulletin, 19(8), 1994, pp. 49-54
Citations number
22
Categorie Soggetti
Material Science","Physics, Applied
Journal title
MRS bulletin → ACNP
ISSN journal
08837694
Volume
19
Issue
8
Year of publication
1994
Pages
49 - 54
Database
ISI
SICI code
0883-7694(1994)19:8<49:COCFAO>2.0.ZU;2-D