ACTIVE GAAS SENSOR ELEMENT FOR DYNAMIC PRESSURE MEASUREMENTS

Authors
SCHWEEGER G LANG C FRICKE K HARTNAGEL HL DOLT R HOHENBERG G
Citation
G. Schweeger et al., ACTIVE GAAS SENSOR ELEMENT FOR DYNAMIC PRESSURE MEASUREMENTS, Electronics Letters, 30(16), 1994, pp. 1355-1356
Citations number
4
Categorie Soggetti
Engineering, Eletrical & Electronic
Journal title
Electronics Letters → ACNP
ISSN journal
00135194
Volume
30
Issue
16
Year of publication
1994
Pages
1355 - 1356
Database
ISI
SICI code
0013-5194(1994)30:16<1355:AGSEFD>2.0.ZU;2-H
Abstract
A piezoelectric pressure sensor is presented which consists of a GaAs MESFET in which the transverse piezoelectric effect is used to charge the gate pad. The MESFET itself acts as an integrated charge amplifier . The sensor gives output signals which are comparable to those of a m uch bulkier commercial measurement system. The sensitivity achieved is 200mV/bar in the range 0 - 20bar.