THERMAL-WAVE PROBE MICROSCOPY FOR MATERIALS CHARACTERIZATION

Authors
SUDDENDORF MB SOMEKH MG LIU M
Citation
Mb. Suddendorf et al., THERMAL-WAVE PROBE MICROSCOPY FOR MATERIALS CHARACTERIZATION, International journal of electronics, 77(1), 1994, pp. 71-76
Citations number
8
Categorie Soggetti
Engineering, Eletrical & Electronic
Journal title
International journal of electronics → ACNP
ISSN journal
00207217
Volume
77
Issue
1
Year of publication
1994
Pages
71 - 76
Database
ISI
SICI code
0020-7217(1994)77:1<71:TPMFMC>2.0.ZU;2-U
Abstract
A system capable of measuring photoreflectance and photodisplacement p henomena simultaneously is described. Results are presented showing th e imaging performance of the system, and the applications to semicondu ctor and thin-film characterization are discussed.