Ah. Khan et al., GROWTH OF ORIENTED ALUMINUM NITRIDE FILMS ON SILICON BY CHEMICAL-VAPOR-DEPOSITION, Journal of Materials Science, 29(16), 1994, pp. 4314-4318
Aluminium nitride films were grown on silicon substrates using the che
mical vapour deposition (CVD) method. The properties of the films were
studied by scanning electron microscopy (SEM), atomic force microscop
e (AFM) measurements, X-ray diffraction and Raman scattering. The resu
lting films were strongly textured and had a preferential orientation
with the c-axis normal to the surface, the Raman spectra showed two pe
aks at 607 and 653 cm-1 and two large bands at 750 and 900 cm-1 of sma
ller intensity. Both the macro- and micro-Raman spectra showed the sam
e peaks.