STUDY OF DENSITY IN PULSED-LASER DEPOSITED AMORPHOUS-CARBON FILMS USING X-RAY REFLECTIVITY

Authors
HUAI Y CHAKER M BROUGHTON JN GAT E PEPIN H GU T BIAN X SUTTON M
Citation
Y. Huai et al., STUDY OF DENSITY IN PULSED-LASER DEPOSITED AMORPHOUS-CARBON FILMS USING X-RAY REFLECTIVITY, Applied physics letters, 65(7), 1994, pp. 830-832
Citations number
14
Categorie Soggetti
Physics, Applied
Journal title
Applied physics letters → ACNP
ISSN journal
00036951
Volume
65
Issue
7
Year of publication
1994
Pages
830 - 832
Database
ISI
SICI code
0003-6951(1994)65:7<830:SODIPD>2.0.ZU;2-J
Abstract
We report the accurate determination of the absolute density of the pu lsed-laser deposited amorphous carbon ultrathin films as well as the f ilm density evolution with the substrate temperatures T(s) (22-300-deg rees-C) using high-resolution x-ray reflectivity. The density values r ho for the films deposited with laser power density of 8 X 10(8) W/cm2 varied from 3.10 to 2.40 g/cm3 as the substrate temperature increased from 22 to 300-degrees-C. This result, together with the optical band -gap values obtained by transmittance measurements, clearly indicates a diamond-like to graphite-like microstructure change near T(s) = 200- degrees-C.