High resolution electron microscopy (HREM) has been used to study misf
it dislocations of ZnSe films grown on vicinal Si(001) substrates tilt
ed 4-degrees towards the [110BAR] axis. In images taken with the elect
ron beam parallel to the [110BAR] direction, 60-degrees dislocations w
ere found to predominate whereas mostly Lomer dislocations or closely
spaced 60-degrees dislocations (separated by <2 nm) were observed in i
mages taken in the orthogonal direction. A model is presented here to
explain the formation of the asymmetric dislocation structure on the b
asis of mechanisms for propagation and formation of misfit dislocation
s.