EFFECTS OF BOUNDARY-CONDITIONS IN THE DYNAMIC-MODEL OF THE RF SHEATH

Citation
N. Sternberg et Va. Godyak, EFFECTS OF BOUNDARY-CONDITIONS IN THE DYNAMIC-MODEL OF THE RF SHEATH, IEEE transactions on magnetics, 30(5), 1994, pp. 3100-3103
Citations number
11
Categorie Soggetti
Engineering, Eletrical & Electronic","Physics, Applied
ISSN journal
00189464
Volume
30
Issue
5
Year of publication
1994
Part
2
Pages
3100 - 3103
Database
ISI
SICI code
0018-9464(1994)30:5<3100:EOBITD>2.0.ZU;2-J
Abstract
The present paper is concerned with the effects of boundary conditions on the electrical sheath characteristics in the dynamic rf sheath mod el. The dynamic rf sheath model, which is described by a moving bounda ry problem, is solved analytically and numerically in the collisionles s case for arbitrary values of the electric field at the plasma-sheath interface. The results that are obtained show that even for relativel y high rf sheath voltages, the rf sheath capacitance and the dc sheath voltage are influenced in a significant way by the choice of the boun dary condition for the electric field.