N. Sternberg et Va. Godyak, EFFECTS OF BOUNDARY-CONDITIONS IN THE DYNAMIC-MODEL OF THE RF SHEATH, IEEE transactions on magnetics, 30(5), 1994, pp. 3100-3103
The present paper is concerned with the effects of boundary conditions
on the electrical sheath characteristics in the dynamic rf sheath mod
el. The dynamic rf sheath model, which is described by a moving bounda
ry problem, is solved analytically and numerically in the collisionles
s case for arbitrary values of the electric field at the plasma-sheath
interface. The results that are obtained show that even for relativel
y high rf sheath voltages, the rf sheath capacitance and the dc sheath
voltage are influenced in a significant way by the choice of the boun
dary condition for the electric field.