SILICON OPTICAL WAVE-GUIDES WITH BURIED-COSI2 CLADDING LAYERS

We report a new Si waveguide that has a buried, metallike cladding. In frared light propagates in a crystal Si layer atop a 50-nm film of bur ied CoSi2 formed by implantation. Experiments in a 20-mum Si structure at the 1.3-mum wavelength show propagation losses below 2.5 dB/cm for TE0 and TM0. Results agree with theory. We also constructed two verti cally integrated Si slab waveguides bounded below by CoSi2 cladding la yers.