APPLICATIONS OF FACETED MIRRORS TO X-RAY-LITHOGRAPHY BEAMLINES

Authors
CHEN GJ GUO JZY CERRINA F
Citation
Gj. Chen et al., APPLICATIONS OF FACETED MIRRORS TO X-RAY-LITHOGRAPHY BEAMLINES, Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment, 347(1-3), 1994, pp. 238-243
Citations number
18
Categorie Soggetti
Nuclear Sciences & Tecnology","Physics, Particles & Fields","Instument & Instrumentation",Spectroscopy
Journal title
Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment → ACNP
ISSN journal
01689002
Volume
347
Issue
1-3
Year of publication
1994
Pages
238 - 243
Database
ISI
SICI code
0168-9002(1994)347:1-3<238:AOFMTX>2.0.ZU;2-J
Abstract
We report the implementation of a generic faceted-mirror simulation ut ility in SHADOW. This extension is suitable for the design of mirror a rrays such as those for synchrotron-radiation-based full-field X-ray l ithography illuminators. As a demonstration, we propose in this paper a practical two-mirror design that can create a uniform 55 mm X 50 mm illumination region at the X-ray mask plane. We also discuss the effec t of multiple mirrors on the partial coherence of the system, and its effect on image formation.