M. Koike et al., A NEW OPTICAL DESIGN METHOD AND ITS APPLICATION TO AN EXTREME-ULTRAVIOLET VARIED LINE SPACING PLANE GRATING MONOCHROMATOR, Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment, 347(1-3), 1994, pp. 273-277
A new design method has been developed for a double-element optical sy
stem. The method incorporates a very simple ray tracing procedure into
an analytic merit function that closely represents the variance of an
infinite number of ray-traced spots in the image plane. A 174-degrees
constant-deviation objective Monk-Gillieson monochromator consisting
of a highly demagnifying (approximately 1/10) spherical mirror, varied
spacing plane grating, and elliptic cylindrical focusing mirror has b
een designed for a bending-magnet beamline using the new design method
. Ray-tracing results show that the new design can provide higher spec
tral purity and throughput as compared to a design based on the light
path function and that the monochromator design gives slit-width-limit
ed resolutions over a wavelength range of 2-5 nm.