Ak. Raychaudhuri et al., SOFT-X-RAY FOUCAULT TEST - A PATH TO DIFFRACTION-LIMITED IMAGING, Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment, 347(1-3), 1994, pp. 364-371
We present the development of a soft X-ray Foucault test capable of ch
aracterizing the imaging properties of a soft X-ray optical system at
its operational wavelength and its operational configuration. This opt
ical test enables direct visual inspection of imaging aberrations and
provides real-time feedback for the alignment of high resolution soft
X-ray optical systems. A first application of this optical test was ca
rried out on a Mo-Si multilayer-coated Schwarzschild objective as part
of the MAXIMUM project. Results from the alignment procedure are pres
ented as well as the possibility for testing in the hard X-ray regime.