THE CENTER FOR X-RAY-LITHOGRAPHY FACILITY STATUS AND BEAMLINES DEVELOPMENT

The University of Wisconsin-Madison Center for X-ray Lithography (CXrL ) is a national facility for basic and applied research in the field o f X-ray lithography operating five beamlines dedicated to X-ray lithog raphy at the University of Wisconsin-Madison Aladdin storage ring. In addition to the beamlines, support facilities for lithographic process ing are available. A recent development program with ARPA and Motorola has led to a large increase in the processing and metrological facili ties available at CXrL. CXrL is in the process of upgrading several ke y aspects of the facility to accommodate the new equipment and researc h initiatives. A description of the facility upgrades and a summary of beamline capabilities, research activities and support facilities is provided.