PULSED-LASER DEPOSITION OF PZT LSCO HETEROSTRUCTURE FOR INTEGRATED FERROELECTRIC DEVICES

The ferroelectric Pb(Zr0.88Ti0.12)03 (PZT)/conductive La0.5Sr0.5CoO3 ( LSCO) hetero-structures have been prepared on (001) LaAlO3 (LAO) and ( 001) Si single crystal substrates by using pulsed laser deposition (PL D) technique. X-ray differactions showed that the PZT and LSCO layers are single phased with distorted perovskite structure, respectively. T he heterostructure on (001) LAO is highly [001] oriented, whereas the heterostructure on (001) Si is poly-crystalline having double texture of [001] and [110]. With the help of XPS analysis the compositions of PZT film have been determined. Using the LSCO film as bottom electrode the ferroelectric hysteresis of the PZT film has been measured.