DETERMINATION OF THE DIAMETER OF THE ELECTRON-PROBE OF A SCANNING ELECTRON-MICROSCOPE

Authors
NOVIKOV YA RAKOV AV STEKOLIN IY STRIZHKOV IB
Citation
Ya. Novikov et al., DETERMINATION OF THE DIAMETER OF THE ELECTRON-PROBE OF A SCANNING ELECTRON-MICROSCOPE, Measurement techniques, 36(12), 1993, pp. 1348-1350
Citations number
4
Categorie Soggetti
Instument & Instrumentation",Engineering
Journal title
Measurement techniques → ACNP
ISSN journal
05431972
Volume
36
Issue
12
Year of publication
1993
Pages
1348 - 1350
Database
ISI
SICI code
0543-1972(1993)36:12<1348:DOTDOT>2.0.ZU;2-C
Abstract
A technique is proposed for determining the diameter of electron probe s used in modem scanning electron microscopes within 1-nm error limits by means of a linear gauge. The gauge is designed for the calibration of such microprobes and represents a relief structure in the form of slotted grooves in silicon with a nearly rectangular profile.